Master thesis: Erosion behavior of Yttrium-Aluminium-Garnets (YAG) in contact with reactive etching plasmas
Ceramics on the basis of Yttrium-Aluminium-Garnets (YAG) are applied in the semiconductor industry, e.g. as support of Si wavers. During the etching process, physical and chemical interactions between the reactive plasma and the YAG surface appear, which determine the service life time of the components. A precise knowledge of the existing erosion mechanisms is … Read more